Diameter: 4¡¨, 5¡¨, 6¡¨
Dopant Source: B2H6,AsH3,PH3
Silicon Source: TCS
Thickness:
0.5 um¡ã180 um
Resistivity:
0.10 ohm-cm¡ã150 ohm-cm |
Diameter: 6¡¨, 8¡¨
Dopant Source: B2H6,AsH3,PH3
Silicon Source: TCS,DCS,SiH4
Thickness:
0.5 um ¡ã 20 um
Resistivity:
0.10 ohm-cm¡ã150 ohm-cm |